Micro-Fluidics Interest Group

In the column on the right you will find useful information about the manufacturing of micro-fluidic devices.

Below you will find recent posts on the 4M Association which are considered to be of interest to the Micro-fluidics Interest Group.

Chromium (Cr)

material properties:
thermal stability up to 500 °C
most relevant chemical non-resistance: strong acids
optical transparency: no

dimensions:
layer thickness: several 100th nm

Gold (Au)

material properties:
thermal stability up to 500 °C
most relevant chemical non-resistance: strong acids
optical transparency: no

dimensions:
layer thickness: several 100th nm

Au, Cu, Al, Ti, Cr, Si3N4, SiO2, TlO2

process parameters:
temperature: <60°C

dimensions:
layer thickness: 10 nm - 1µm

Silicon (Si)

material properties:
thermal stability up to <400 °C
most relevant chemical non-resistance: KOH
optical transparency: not for visible light

dimensions:
min. hole diameter: 100 micron

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