Micro-Fluidics Interest Group

In the column on the right you will find useful information about the manufacturing of micro-fluidic devices.

Below you will find recent posts on the 4M Association which are considered to be of interest to the Micro-fluidics Interest Group.

Glass/Glass, Silicon/Glass, Silicon/Silicon

material properties:
thermal stability up to 400 °C
most relevant chemical non-resistance: KOH, HF
optical transparency: no

process parameters:
temperature: room temperature
notes: fusion bonding

Silicon and Glass

material properties:
thermal stability up to 400°C
most relevant chemical non-resistance: KOH, HF
optical transparency: no

Silicon-Silicon (Si-Si)

material properties:
thermal stability up to 400°C
most relevant chemical non-resistance: KOH
optical transparency: no

SiOxNy

material properties:
thermal stability up to ~1000 °C
most relevant chemical non-resistance: HF, H3PO4

process parameters:
temperature: 300 °C
used chemicals: N2, SiH4, N2O
layer thickness: standard several 100th nm notes: PECVD

Parylene C

material properties:
thermal stability up to 120 °C
most relevant chemical non-resistance: good stability towards acids, bases and solvents
optical transparency: 350 - 1670 nm approx. 90 %

process parameters:
temperature: roomtemperature
used chemicals: A174 silan as adhesive agent
layer thickness 30 µm

4th congress on Micro and Nano Manufacturing

Micromachines - Supporting the 4M Association

MDPI - Supporting the 4M Association

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Micro-Fluidics Interest Group

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