Micro-Fluidics Interest Group

In the column on the right you will find useful information about the manufacturing of micro-fluidic devices.

Below you will find recent posts on the 4M Association which are considered to be of interest to the Micro-fluidics Interest Group.

PDMS/PDMS (Polydimethylsiloxane)

process parameters:
temperature: room temperature
used chemicals: oxygen plasma

Process Details

used material: Polymethylmethacrylate (PMMA)

material properties:
optical transparency: yes

process parameters:
temperature: around 90 - 110 °C

Polycarbonate

material properties:
thermal stability up to about 140°C
most relevant chemical non-resistance: acetone
optical transparency: yes

process parameters:
temperature: about 100°C
used chemicals: confidential

SU-8 commercial foils

Contact:

FEMTO-ST

CNRS-FEMTO-ST
Dpt. LPMO
Dr. Chantal Khan Malek
32 Av. de l' Observatoire
25044 Besancon
France

phone: +33 (0)3 81 85 39 35
chantal.khan-malek@femto-st.fr

Silicon/Silicon

Contact:

IMTEK

University Freiburg, Institute of Microsystem Technology, IMTEK
Department for Process Technology
Dr. Andreas Schoth
Georges-Köhler Allee 103
79110 Freiburg
Germany

phone: +497612037355
Andreas.Schoth@imtek.uni-freiburg.de

4th congress on Micro and Nano Manufacturing

Micromachines - Supporting the 4M Association

MDPI - Supporting the 4M Association

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Micro-Fluidics Interest Group

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