Micro-Fluidics Interest Group

In the column on the right you will find useful information about the manufacturing of micro-fluidic devices.

Below you will find recent posts on the 4M Association which are considered to be of interest to the Micro-fluidics Interest Group.

SU-8 Resist

material properties:
most relevant chemical non-resistance: acetone

process parameters:
temperature: < 105 °C
exposure wavelength: 365 nm
used chemicals: isopropanole, acetone for wafercleaning

Gold (Au) ball-wedge bonding

material properties:
thermal stability up to 150 °C

process parameters:
temperature: < 50 °C

Gold (Au) wedge-wedge bonding

material properties:
thermal stability up to 150 °C

process parameters:
temperature: 100 - 150 °C

Aluminium (Al)

material properties:
thermal stability up to 150 °C

process parameters:
temperature: 100 - 150 °C
notes: wedge-wedge bonding

Glass/PDMS (Polydimethylsiloxane)

process parameters:
temperature: room temperature
used chemicals: oxygen plasma

4th congress on Micro and Nano Manufacturing

Micromachines - Supporting the 4M Association

MDPI - Supporting the 4M Association

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Micro-Fluidics Interest Group

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