This biannual conference is the fifth in the series following its successful launch in 2003.

Due to the interdisciplinary spirit of the event a wide range of topics is covered related to the design, fabrication, packaging and system integration of MEMS and NEMS-based sensors and actuators applying smart approaches. Furthermore, basic as well as more application-oriented research topics are addressed, thus stimulating in a cooperative atmosphere the exchange between academia and industry.

For more details click on link below to download the Call for Papers.