Silicon (Si)

material properties:
thermal stability up to <400 °C
most relevant chemical non-resistance: KOH
optical transparency: not for visible light

dimensions:
min. hole diameter: 100 micron

Contact:

RAL

Rutherford Appleton Laboratory
CMF
Dr. Andreas Schneider
Building R18 room G55
Chilton, Didcot
Oxfordshire
OX11 0QX
United Kingdom

phone: +44-(0)1235-44-5178
A.Schneider@rl.ac.uk

4th congress on Micro and Nano Manufacturing

Micromachines - Supporting the 4M Association

MDPI - Supporting the 4M Association

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