Process Details

used material: Doped Silicon

dimensions:
min. structure wide: 100µm
wire from 50 to 250 µm

Contact:

FEMTO-ST

CNRS-FEMTO-ST
Dpt. LPMO
Dr. Chantal Khan Malek
32 Av. de l' Observatoire
25044 Besancon
France

phone: +33 (0)3 81 85 39 35
chantal.khan-malek@femto-st.fr

4th congress on Micro and Nano Manufacturing

Micromachines - Supporting the 4M Association

MDPI - Supporting the 4M Association

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