Process Details

used materials: Different Photopolymers

material properties:
most relevant chemical non-resistance: acetone, KOH
optical transparency: different

min. structure wide: x, y: 10µm, z: 100µm
aspect ratio: different, depends on hole diameter



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phone: +49 (0)9131 97790-13

4th congress on Micro and Nano Manufacturing

Micromachines - Supporting the 4M Association

MDPI - Supporting the 4M Association

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