Process Details

used materials: Different Photopolymers

material properties:
most relevant chemical non-resistance: acetone, KOH
optical transparency: different

dimensions:
min. structure wide: x, y: 10µm, z: 100µm
aspect ratio: different, depends on hole diameter

Contact:

BLZ

Bayerisches Laserzentrum GmbH
Head of Medical Technology
Dr. Stephan Roth
Konrad-Zuse-Straße 2 - 6
91052 Erlangen
Germany

phone: +49 (0)9131 97790-13
s.roth@blz.org

4th congress on Micro and Nano Manufacturing

Micromachines - Supporting the 4M Association

MDPI - Supporting the 4M Association

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