Process Details

used materials: COC, PMMA, PC

dimensions:
min. structure wide: 20 µm
aspect ratio: 5

Contact:

IMTEK

University Freiburg, Institute of Microsystem Technology, IMTEK
Department for Process Technology
Dr. Andreas Schoth
Georges-Köhler Allee 103
79110 Freiburg
Germany

phone: +497612037355
Andreas.Schoth@imtek.uni-freiburg.de

4th congress on Micro and Nano Manufacturing

Micromachines - Supporting the 4M Association

MDPI - Supporting the 4M Association

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