Au, Cu, Al, Ti, Cr, Si3N4, SiO2, TlO2

process parameters:
temperature: <60°C

dimensions:
layer thickness: 10 nm - 1µm

Contact:

FEMTO-ST

CNRS-FEMTO-ST
Dpt. LPMO
Dr. Chantal Khan Malek
32 Av. de l' Observatoire
25044 Besancon
France

phone: +33 (0)3 81 85 39 35
chantal.khan-malek@femto-st.fr

4th congress on Micro and Nano Manufacturing

Micromachines - Supporting the 4M Association

MDPI - Supporting the 4M Association

User login

Micro-Fluidics Interest Group

  • You must login in order to post into this group.